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VeTek semiconductor Technology Co., LTD

Products >> CVD TaC Coated Susceptor

CVD TaC Coated Susceptor

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Product Name: CVD TaC Coated Susceptor
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The VETEK CVD TaC Coated Susceptor is a high-end wafer carrier component specifically used for third-generation semiconductor (SiC, GaN, AlN) epitaxial processing. This product combines the physical advantages of two high-performance materials:



High-Purity Graphite Substrate: Utilizes an isostatic pressing molding process to ensure the substrate possesses superior structural strength, high density, and thermal processing stability.
CVD TaC Coating: A dense, stress-free Tantalum Carbide (TaC) protective layer is grown on the graphite surface through advanced Chemical Vapor Deposition (CVD) technology.


Contact Us
Company: VeTek semiconductor Technology Co., LTD
Contact: Ms. Andy Year
Address: Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China
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Tel: 15300650061
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