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| Product Name: |
MOCVD SiC Coated Susceptor
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Ultimate Precision in Thermal Uniformity Control: Unlike conventional carriers, VETEK susceptors achieve highly synchronized heat transfer across the entire surface through nanometer-scale precision control of coating thickness and thermal resistance. This sophisticated thermal management effectively minimizes wavelength standard deviation (STD) on the wafer surface, significantly boosting both single-wafer quality and overall batch consistency.
Long-term Protection with Zero Particle Contamination: In MOCVD reaction chambers containing highly corrosive gases, ordinary graphite pedestals are prone to particle flaking. VETEKĄ¯s CVD SiC coating possesses exceptional chemical inertness, acting as an impenetrable shield that seals graphite micropores. This ensures total isolation of substrate impurities, preventing any contamination of the GaN or SiC epitaxial layers.
Exceptional Fatigue Resistance and Service Life: Thanks to VETEKĄ¯s proprietary interface treatment process, our SiC coating achieves an optimized thermal expansion match with the graphite substrate. Even under high-frequency thermal cycling between extreme temperatures, the coating maintains superior adhesion without peeling or developing micro-cracks. This significantly reduces the frequency of ***re part maintenance and lowers your total cost of ownership. |
| Company: |
VeTek semiconductor Technology Co., LTD
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| Contact: |
Ms. Andy Year |
| Address: |
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China |
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| Tel: |
15300650061 |
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