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Solid SiC Focus Ring
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Veteksemi solid SiC focus ring core advantages
Excellent plasma corrosion resistance
Under prolonged exposure to highly corrosive, high-density plasmas such as CF4, O2, and Cl2, conventional materials are susceptible to rapid wear and particle contamination. Our solid SiC focus ring exhibits excellent corrosion resistance, with a corrosion rate far lower than that of materials like quartz or alumina. This means it maintains a smooth surface over time, significantly reducing the risk of wafer defects caused by component wear and tear, ensuring continuous and stable mass production.
Excellent high temperature stability and thermal management performance
The semiconductor etching process generates significant heat, causing chamber components to experience dramatic temperature fluctuations. Our focus rings have an extremely low coefficient of thermal expansion, capable of withstanding transient temperatures up to 1600℃ without cracking or deformation. Furthermore, their inherent high thermal conductivity helps disperse heat evenly and quickly, effectively improving temperature distribution at the wafer edge, thereby enhancing etching uniformity and consistency of critical dimensions across the entire wafer.
Extraordinary material purity and structural density
We strictly control the purity of silicon carbide raw materials (¡Ý99.999%) and eliminate metal contamination during the sintering process to meet the stringent requirements of advanced manufacturing processes for trace impurity control. The dense structure formed through high-temperature sintering has extremely low porosity, almost completely blocking the penetration of process gases and by-products. This prevents performance degradation and particle growth caused by internal material degradation, ensuring a pure process chamber environment.
Long-lasting mechanical life and comprehensive cost-effectiveness
Co***red to conventional consumables that require frequent replacement, Veteksemi solid SiC focus rings offer exceptional du |
| Company: |
VeTek semiconductor Technology Co., LTD
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| Contact: |
Ms. Andy Year |
| Address: |
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China |
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| Tel: |
15300650061 |
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