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VeTek semiconductor Technology Co., LTD

Products >> SiC Ceramic vacuum chuck for wafer

SiC Ceramic vacuum chuck for wafer

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Product Name: SiC Ceramic vacuum chuck for wafer
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Veteksemicon sic ceramic vacuum chuck for wafer is a core component developed specifically for third-generation semiconductor manufacturing, optimized for the high-temperature, high-pressure processing environments experienced by wafers. Made from high-purity ceramic materials, precision machining, and specialized surface treatment ensure stable vacuum holding performance and excellent thermal stability in the demanding semiconductor manufacturing process.Our vacuum chucks have been field-proven by hundreds of semiconductor manufacturers, demonstrating excellent performance in critical processes such as SiC epitaxy, ion implantation, and photolithography. They effectively address wafer warpage and positioning accuracy issues caused by high material hardness and high process temperatures.

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Company: VeTek semiconductor Technology Co., LTD
Contact: Ms. Andy Year
Address: Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China
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Tel: 15300650061
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