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| Product Name: |
Silicon Carbide Carrier Plate For LED Etching
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Veteksemicon Silicon Carbide Carrier Plate For LED Etching core advantages
1. Excellent chemical resistance
During wet or dry etching of LED chips, carriers are constantly exposed to highly corrosive chemicals such as hydrofluoric acid, nitric acid, and phosphoric acid. Traditional quartz materials gradually erode, resulting in surface roughness and particle contamination. Veteksemicon silicon carbide carriers, with their inherent chemical inertness, effectively resist attack from various acids and bases, ensuring they maintain surface integrity and a smooth finish even after hundreds of cycles of rigorous processing. This significantly extends their service life and maintains the cleanliness of the process chamber.
2. Excellent high temperature stability and dimensional accuracy
Semiconductor processing involves frequent thermal cycling, making the material's coefficient of thermal expansion (CTE) crucial. Our silicon carbide susceptors have an extremely low CTE, perfectly matching the silicon wafer. They effectively resist thermal stress, preventing warping or deformation while maintaining exceptional dimensional stability at sustained operating temperatures of hundreds of degrees Celsius. This ensures uniform contact between the wafer and the susceptor, ensuring excellent etching process uniformity and high batch-to-batch consistency.
3. High purity and ultra-low pollution
LED epitaxial wafers are extremely sensitive to metal impurities. Even the slightest contamination can lead to reduced chip luminous efficiency and yield loss. Veteksemicon utilizes ultra-high-purity raw materials, advanced sintering processes, and rigorously controls the production environment to minimize metal ion impurities in its products. This uncompromising pursuit of purity from the source provides the most reliable protection for your sensitive optoelectronic devices, directly contributing to improved product yield and performance.
4. Excellent mechanical properties and long life
Silicon carbide |
| Company: |
VeTek semiconductor Technology Co., LTD
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| Contact: |
Ms. Andy Year |
| Address: |
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China |
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| Tel: |
15300650061 |
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