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SiC coated graphite susceptor for ASM
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Veteksemicon SiC coated graphite susceptor for ASM core advantages
1. Extreme purity and low defect rate
Using high-purity, fine-particle-grade special graphite substrate, combined with our strictly controlled chemical vapor deposition (CVD) coating process, we ensure that the coating is dense, free of pinholes, and free of impurities. This significantly reduces the risk of particulate contamination during the epitaxial process, providing a clean substrate environment for the growth of high-quality epitaxial layers.
2. Excellent corrosion resistance and wear resistance
The pyrolytic silicon carbide coating possesses extremely high hardness and chemical inertness, effectively resisting the erosion of silicon sources (such as SiH4, SiHCl3), carbon sources (such as C3H8), and etching gases (such as HCl, H2) at high temperatures. This significantly extends the maintenance cycle of the base and reduces machine downtime caused by component replacement.
3. Excellent thermal uniformity and stability
We optimized the thermal field distribution within the operating temperature range through precise substrate structure design and coating thickness control. This directly translates into excellent thickness and resistivity uniformity in the epitaxial wafer, contributing to improved chip manufacturing yield.
4. Excellent coating adhesion strength
Unique surface pretreatment and gradient coating technology enable the silicon carbide coating to form a strong bonding layer with the graphite substrate, effectively preventing coating peeling, flaking, or cracking problems that may occur during long-term thermal cycling.
5. Precise size and structural replication
We possess mature CNC machining and testing capabilities, enabling us to completely replicate the complex geometry, cavity dimensions, and mounting interfaces of the original base, ensuring perfect matching and plug-and-play functionality with the customer's platform.
6. Ecological chain verification endorsement
Vet |
| Company: |
VeTek semiconductor Technology Co., LTD
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| Contact: |
Ms. Andy Year |
| Address: |
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China |
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| Tel: |
15300650061 |
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