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| Product Name: |
Large sized resistance heating SiC crystal growth
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| Related proudcts |
sic crystal growth, |
| Specifications |
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Core Advantages
¡ñ Full-Size Co***tibility
Enables stable growth of 6-inch, 8-inch, and 12-inch silicon carbide crystals, fully co***tible with conductive, semi-insulating, and N-type material systems. It covers the production needs of products with different specifications and adapts to diverse application scenarios.
¡ñ Strong Process Stability
The 8-inch crystals have excellent 4H polytype consistency, stable surface shape, and high repeatability; the 12-inch silicon carbide crystal growth technology has completed verification with high mass production feasibility.
¡ñ Low Crystal Defect Rate
Through precise control of temperature, pressure, and power, crystal defects are effectively reduced with key indicators meeting standards¡ªEPD=1435 ea/cm2, BPD=381 ea/cm2, TSD=0 ea/cm2, and TED=1054 ea/cm2. All defect indicators meet high-grade crystal quality requirements, significantly improving ingot yield.
¡ñ Controllable Operating Costs
It has the lowest energy consumption among similar products. Core components (such as thermal insulation shields) have a long replacement cycle of 6-12 months, reducing comprehensive operating costs.
¡ñ Plug-and-Play Convenience
Customized recipe and process packages based on equipment characteristics, verified through long-term and multi-batch production, allowing immediate production after installation.
¡ñ Safety and Reliability
Adopts a special anti-arc ***rk design to eliminate potential safety hazards; real-time monitoring and early warning functions proactively avoid operational risks.
¡ñ Excellent Vacuum Performance
The ultimate vacuum and pressure rise rate indicators exceed internationally leading levels, ensuring a clean environment for crystal growth.
¡ñ Intelligent Operation and Maintenance
Features an intuitive HMI interface combined with comprehensive data recording, supporting optional remote monitoring functions for efficient and convenient production management.
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| Company: |
VeTek semiconductor Technology Co., LTD
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| Contact: |
Ms. Andy Year |
| Address: |
Wangda Road, Ziyang Street, Wuyi County, Jinhua City, Zhejiang Province, China |
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| Tel: |
15300650061 |
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